HITACHI SU8030

Cold field emission with ultra low voltage imaging resolution of 1.3nm at 1.0kV

Probe current from 1pA to >5nA enable both, imaging of beam sensitive samples and fast EDS analysis

• Lower/Upper/Top (Triple) electron detectors with ExB filter
• Large chamber/large stage model
• PD-BSE
• Deceleration Modus (low kV from 100V)
• STEM capability

EDS analysis Bruker QUANTAX 6G

• Typ 200, XFlash 6/60-250, SDD slew 60
• Analysis in light element and low energy range
• 126 eV resolution at Mn-Ka
• point, multipoint, area, linescan, mapping, hypermapping

Bruker ESPRIT Software (standardless quantification)