HITACHI SU8030
Cold field emission with ultra low voltage imaging resolution of 1.3nm at 1.0kV
Probe current from 1pA to >5nA enable both, imaging of beam sensitive samples and fast EDS analysis
- Lower/Upper/Top (Triple) electron detectors with ExB filter
- Large chamber/large stage model
- PD-BSE
- Deceleration Modus (low kV from 100V)
- STEM capability
EDS analysis Bruker QUANTAX 6G
- Typ 200, XFlash 6/60-250, SDD slew 60
- Analysis in light element and low energy range
- 126 eV resolution at Mn-Ka
- point, multipoint, area, linescan, mapping, hypermapping
Bruker ESPRIT Software (standardless quantification)