Institut für Physikalische und Theoretische Chemie

The Microscope


The Microscope

HITACHI SU8030

Cold field emission with ultra low voltage imaging resolution of 1.3nm at 1.0kV

Probe current from 1pA to >5nA enable both, imaging of beam sensitive samples and fast EDS analysis

  • Lower/Upper/Top (Triple) electron detectors with ExB filter
  • Large chamber/large stage model
  • PD-BSE
  • Deceleration Modus (low kV from 100V)
  • STEM capability

EDS analysis Bruker QUANTAX 6G

  • Typ 200, XFlash 6/60-250, SDD slew 60
  • Analysis in light element and low energy range
  • 126 eV resolution at Mn-Ka
  • point, multipoint, area, linescan, mapping, hypermapping

Bruker ESPRIT Software (standardless quantification)