Angle resolved XPS
- up to 2" wafer samples
- heating up to 1200°C
- ion beams for cleaning and IBAD
- MBE: water cooled Knudsen-cells, pBN crucibles, QMB micro balance
- XPS: XR-50 X-ray Source: Al Ka 400W, Mg Ka 350W;
- Phoibos 100 MCD electron analyzer (Specs)
- LEED
- UPS
- RHEED
