In der Dünnfilm- und Oberflächenanalyse bietet LISA+ verschiedene Möglichkeiten zur Oberflächenabbildung, Schichtdickenkontrolle, sowie der Bestimmung der Topographie. Zudem können dünne Schichten auf ihre Zusammensetzung, Element-Verteilung sowie chemische Bindungen hin analysiert werden. Darüber hinaus steht uns Equipment zur elektrischen Charakterisierung zur Verfügung.
Zu unseren abbildenden Methoden gehören die
Die Topographie- und Schichtdickenmessung erfolgt mittels
Für die Elementanalyse kann von uns im wesentlichen durchgeführt werden mittels
Die Struktur- und Phasenanalyse erfolgt haupsächlich über
Um eine elektrische Charaktiersierung durchzuführen bietet LISA+ diverses Equipment zur elektrischen Kontaktierung:
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