Beim Spin Coating wird in der Regel ein flüssiges Polymer auf ein Substrat gebracht und durch Abschleudern der überschüssigen Flüssigkeit ein dünner Film erzeugt. In einem anschließenden Softbake Schritt wird das im Film verbliebene Lösungsmittel vollends ausgetrieben. Die resultierende Schichtdicke hängt hauptsächlich von der Viskosität des Polymers und der Umdrehungszahl ab.
Der Spin Coater wird hauptsächlich zur Belackung mit Photo- und Ebeam-Lacken verwendet. Es können von kleinen Stücken mit 5x5 mm² bis hin zu ganzen 6" Wafer belackt werden. Die Umdrehungszahl lässt sich stufenlos von 200 bis 8000 rpm einstellen. Auf einer separaten Hotplate können Substrate bei bis zu 450°C ausgebacken bzw. dehydriert werden.
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