Facilities

The multidisciplinary nanostructure laboratory is the central research unit of LISA⁺.

It includes a cleanroom (total area 440 m²; 102 m² class 1000 and 156 m² class 10000)

and a lab space of more than 20 rooms (total area ∼800 m²).

The basic equipment of LISA⁺ can be assigned to four research areas:

1. Thin film deposition
2. Micro & nanopatterning
3. Thin film / surface analytics
4. Laser scanning microscopy, ultrafast lasers.