Our imaging methods include
- scanning electron microscopy
- scanning ion microscopy,
- and optical microscopy.
The topography and layer thickness measurement is carried out by means of
- scanning force microscopy,
- optical and tactile profilometry,
- and monochromatic ellipsometry.
For elemental analysis we offer equipment for
- Auger electron spectroscopy,
- energy dispersive X-ray spectroscopy,
- photoelectron spectroscopy,
- fourier-transform infrared spectroscopy,
- UV/Vis fluorescence & transmission spectroscopy,
- Raman spectroscopy,
- mass spectrometry with atmospheric probe, and
- Gas Chromatography-Mass Spectrometry (GC/MS) coupling.
The structural and phase analysis is carried out mainly via
- 4-circle X-ray diffractometer (XRD),
- spectroscopic ellipsometry,
- scanning tunneling microscopy
- and contact angle measurements.
LISA+ offers a variety of equipment for electrical characterization:
- FIB/HIM micromanipulators,
- probe stations,
- wire bonder, and
- parallel gap welding.
